Fracture of Anodic-Bonded Silicon-Thin Film Glass-Silicon Triple Stacks
- Authors
- L. . Y. Shang, Z. L. Shang and B. H. Skallerud
- Status
- Published
- Publication type
- Journal Article
- Year of publication
- 2008
- Journal
- Engineering Fracture Mechanics
- Publisher
- -
- Citation key
- 11247